SCHUMACHER ATCS-15 1464-0320 control bubbler
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The SCHUMACHER ATCS-15 1464-0320 control bubbler is a component of a chemical vapor deposition (CVD) system used in the semiconductor manufacturing industry. The control bubbler is used to deliver a controlled flow of a liquid precursor into the CVD reactor to deposit thin films onto a substrate.
The SCHUMACHER ATCS-15 1464-0320 control bubbler is designed to precisely control the flow of the precursor liquid into the CVD reactor. The bubbler includes a heater to vaporize the liquid precursor and a temperature sensor to monitor and control the temperature of the bubbler. It also includes a pressure sensor to monitor and control the pressure in the bubbler and a flow meter to measure the flow rate of the precursor.
The control bubbler communicates with the CVD reactor control system using a variety of communication protocols such as RS-232 and Ethernet. This allows the CVD reactor control system to precisely control the flow rate of the precursor and the other parameters of the CVD process.
The SCHUMACHER ATCS-15 1464-0320 control bubbler is designed to be highly reliable, with redundant components and communication ports to ensure continuous operation. It is also designed to be easily integrated into existing semiconductor manufacturing equipment, with support for a variety of software and communication protocols.
Overall, the SCHUMACHER ATCS-15 1464-0320 control bubbler is a critical component of a chemical vapor deposition system used in semiconductor manufacturing. It provides precise control over the flow of a liquid precursor into the CVD reactor, allowing for the deposition of high-quality thin films onto a substrate.
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